Special Issue "MEMS Actuators and Sensors 2021"

A special issue of Actuators (ISSN 2076-0825).

Deadline for manuscript submissions: closed (30 November 2021) | Viewed by 764

Special Issue Editors

Dr. Thilo Sandner
E-Mail Website
Guest Editor
Department of Active Microoptical Components and Systems, Fraunhofer Institute for Photonic Microsystems IPMS, Maria-Reiche-Straße 2, 01109 Dresden, Germany
Interests: optical MEMS (micro scanning mirrors); design, sensing and driving control of MEMS actuators, system design and integration of MOEMS for industrial (solid state LiDAR), spectroscopic and biomedical applications
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Prof. Dr. Gerald Gerlach
E-Mail Website
Guest Editor
Faculty of Electrical and Computer Engineering, Institute of Solid State Electronics, Technische Universität Dresden and Center for Advancing Electronics Dresden, 01062 Dresden, Germany
Interests: physical and chemical sensors; modelling and simulation; functional materials
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Prof. Dr. Jan Mehner
E-Mail Website
Guest Editor
Faculty of Electrical and Computer Engineering, Institute of Microsystems and Semiconductor Technologies, Technische Universität Chemnitz, 09111 Chemnitz, Germany
Interests: design of microsystems (MEMS); modeling and simulation of coupled fields; finite element methods (FEM) and boundary element methods (BEM); reduced order modeling (ROM) and design automation; application of microsystems for industrial automation, automotive and consumer products
Special Issues, Collections and Topics in MDPI journals

Special Issue Information

Dear Colleagues,

Micro- actuators are an essential part of Micro-Electro-Mechanical Systems (MEMS). During the last two decades they benefit from the significant technological progress in micro-electronics and micro-system technology similar to MEMS sensors using also silicon as the common material for MEMS actuators. Due to miniaturization cost reduction, high positioning speed, low power consumption, friction free operation and high reliability can realized for MEMS actuators. By combining actuator mechanisms, sensors for position feedback and micro electronic circuitry complete highly miniaturized servo mechanism and mechatronic systems can be realized on the same chip at low cost. An increasing number of applications have been realized for MEMS actuators. Examples are electrostatic MOEMS for optical applications, like micro-scanning mirrors used nowadays in solid state LIDAR systems for autonomous navigation, spectral tunable QCL-laser sources or highly miniaturized NIR spectrometers. Fluidic MEMS actuators are developed for pumps and valves for medical drug delivery and lab on chip systems. Today, electrostatic out-of plane comb drive MEMS actuators are widely-used. But actual developments for CMOS compatible piezoelectric actuators (e.g. based on AlNi or AlScNi) are highly attractive to lower driving voltage and power consumption. Significant in-plane deflections can be realized by means of a novel class of electrostatic NED actuators interesting for future use in acoustic (loud speaker) or micro-fluidic (micro-pump) applications. Due to low-damping of non-fluidic MEMS actuators a sophisticated closed lope position control is essential for practical applications. Even silicon is the dominate other materials are also interesting for novel MEMS actuators like smart hydrogels or shape memory alloys.

The objective of this Special Issue is to present actual and significant work in the field of MEMS actuators: authors from academia and industry are kindly invited to share their research innovations in this field. We welcome review articles and original research papers aiming to the related key issues of basic research, device and technology development, system integration and practical application of MEMS actuators.

This Special Issue invites contributions in the following topics, but is not limited to:

  • Novel MEMS device concepts and actuation principles of micro-actuators:  e.g. electrostatic, electromagnetic, piezo-electric, thermal, pneumatic, leviation
  • Closed loop control and sensing of resonant and non-resonant MEMS driving
  • Optical MEMS; e.g. micro-scanning mirrors, spatial light modulators, Fabry-Perot-filter
  • Acoustical MEMS: e.g. MEMS loudspeaker based on NED actuation
  • MEMS for fluidic and pneumatic MEMS; e.g. micro valves and pumps, ink print heads
  • Novel materials and MEMS fabrication technologies for micro-actuators: e.g. CMOS compatible piezoelectric MEMS based on AlNi or AlSrNi; smart hydrogel actuator, shape memory alloy based micro-actuators
  • Practical application of micro-actuators:  e.g. MOEMS based solid state LiDAR used for autonomous driving, tunable lasers, miniaturized NIR spectrometer; fluidic MEMS actuators for bio-medical applications in diagnostics and lab-on-chip
  • Review article on MEMS-actuators, their technology progress and application landscape

This special issue is focused more on actuators. Papers focus on Sensors may choose our joint Special Issue in Sensors (ISSN 1424-8220).

Dr. Thilo Sandner
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Actuators is an international peer-reviewed open access monthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 1800 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.


  • micro-mechanical actuator
  • MEMS
  • micro-mirror
  • spatial light modulator
  • micro scanning mirror
  • resonant and non-resonant MEMS driving control
  • acoustical MEMS
  • microfluidic and hydraulic micro-actuators
  • CMOS compatible MEMS actuators

Published Papers

There is no accepted submissions to this special issue at this moment.
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