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Journal: Micro, 2024
Volume: 4
Number: 10

Article: Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications
Authors: by Christian Behl, Regine Behlert, Jan Seiler, Christian Helke, Alexey Shaporin and Karla Hiller
Link: https://www.mdpi.com/2673-8023/4/1/10

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