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MDPIMDPI
Journal: MicroVolume: 4Number: 10
Article: Characterization of Thin AlN/Ag/AlN-Reflector Stacks on Glass Substrates for MEMS Applications
  • Authors:
  • Christian Behl1,*,
  • Regine Behlert1,† and
  • Karla Hiller1,2
  • et al.
Link: https://www.mdpi.com/2673-8023/4/1/10

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