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Journal: Surfaces, 2025
Volume: 8
Number: 51
51
Article: Morphological and Functional Evolution of Amorphous AlN Thin Films Deposited by RF-Magnetron Sputtering
Authors: by Maria-Iulia Zai, Ioana Lalau, Marina Manica, Lucia Chiriacescu, Vlad-Andrei Antohe, Cristina C. Gheorghiu, Sorina Iftimie, Ovidiu Toma, Mirela Petruta Suchea and Ștefan Antohe
Link: https://www.mdpi.com/2571-9637/8/3/51

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