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Journal: Proceedings, 2024
Volume: 97
Number: 114
Article:
Piezoelectric Layer Transfer Process for MEMS
Authors:
by
Gwenael Le Rhun, Franklin Pavageau, Timothée Rotrou, Christel Dieppedale and Laurent Mollard
Link:
https://www.mdpi.com/2504-3900/97/1/114
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