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Journal: Proceedings, 2024
Volume: 97
Number: 101

Article: Electrostatic Microelectromechanical System Speaker Array with Out-of-Plane Piston Displacement and Simplified Microfabrication
Authors: by Diogo E. Aguiam, Inês S. Garcia, Edoardo Sotgiu and Filipe S. Alves
Link: https://www.mdpi.com/2504-3900/97/1/101

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