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Journal: Proceedings, 2020
Volume: 56
Number: 13
Article:
Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications
Authors:
by
Johann Zehetner, Alexander Kromka, Tibor Izsák, Gabriel Vanko, Lenka Gajdošová and Stephan Kasemann
Link:
https://www.mdpi.com/2504-3900/56/1/13
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