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Journal: InorganicsVolume: 11Number: 477
Article: Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates
- Authors:
- Carlos Morales1,
- Ali Mahmoodinezhad1 and
- Rudi Tschammer1
- et al.
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