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Journal: Inorganics, 2023
Volume: 11
Number: 477

Article: Combination of Multiple Operando and In-Situ Characterization Techniques in a Single Cluster System for Atomic Layer Deposition: Unraveling the Early Stages of Growth of Ultrathin Al2O3 Films on Metallic Ti Substrates
Authors: by Carlos Morales, Ali Mahmoodinezhad, Rudi Tschammer, Julia Kosto, Carlos Alvarado Chavarin, Markus Andreas Schubert, Christian Wenger, Karsten Henkel and Jan Ingo Flege
Link: https://www.mdpi.com/2304-6740/11/12/477

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