Article Versions Notes

Li T, Wang J, Zhou S, Quan H, Chen L, Liu J, Du J, Zhu X, Hu S. Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement. Photonics. 2023; 10(2):168. https://doi.org/10.3390/photonics10020168

Li, Tian, Jian Wang, Shaolin Zhou, Haiyang Quan, Lei Chen, Junbo Liu, Jing Du, Xianchang Zhu, and Song Hu. 2023. "Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement" Photonics 10, no. 2: 168. https://doi.org/10.3390/photonics10020168

Li, T., Wang, J., Zhou, S., Quan, H., Chen, L., Liu, J., Du, J., Zhu, X., & Hu, S. (2023). Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement. Photonics, 10(2), 168. https://doi.org/10.3390/photonics10020168