Kang, S.; Woo, J.; Kim, G.; Min, D.; Lee, J.; Jeon, E.-c.
Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type. Processes 2024, 12, 2321.
https://doi.org/10.3390/pr12112321
AMA Style
Kang S, Woo J, Kim G, Min D, Lee J, Jeon E-c.
Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type. Processes. 2024; 12(11):2321.
https://doi.org/10.3390/pr12112321
Chicago/Turabian Style
Kang, Seongmin, Jiyun Woo, Goeun Kim, Daekee Min, Joohee Lee, and Eui-chan Jeon.
2024. "Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type" Processes 12, no. 11: 2321.
https://doi.org/10.3390/pr12112321
APA Style
Kang, S., Woo, J., Kim, G., Min, D., Lee, J., & Jeon, E.-c.
(2024). Study on the Destruction and Removal Efficiency (DRE) of Perfluorinated Compound Gases Used in Semiconductor and Display Processes in Korea: DRE and Uncertainty by Scrubber Type. Processes, 12(11), 2321.
https://doi.org/10.3390/pr12112321
