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Chemosensors 2018, 6(4), 67; https://doi.org/10.3390/chemosensors6040067

Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas

1
Institute of Nanotechnologies, Electronics and Equipment Engineering, Southern Federal University, Chekhov str. 2, 347928 Taganrog, Russia
2
Faculty of Physics, Southern Federal University, Zorge str. 5, 344090 Rostov-on-Don, Russia
*
Author to whom correspondence should be addressed.
Received: 14 November 2018 / Revised: 7 December 2018 / Accepted: 14 December 2018 / Published: 19 December 2018
(This article belongs to the Special Issue Thin Film Based Sensors)
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Abstract

The SiO2ZrO2 composite films were prepared by means of sol-gel technology and characterized by scanning electron microscopy, energy dispersive X-ray (EDX) analysis, and X-ray diffraction. The presence of the stable monoclinic ZrO2 with an impurity of tetragonal phases is shown. The film surface is characterized by the presence of ZrOCl2·6H2O or ZrCl(OH)/ZrCl(OH)2 grains. The crystallite size negligibly depends on the annealing temperature of the film and amount to 10–12 nm and 9–12 nm for the films thermally treated at 200 °C and 500 °C, respectively. The film’s resistance is rather sensitive to the presence of NO2 impurities in the air at a low operating temperature (25 °C). Accelerated stability tests of the initial resistance showed high stability and reproducibility of the sensor based on the SiO2ZrO2 film thermally treated at 500 °C. View Full-Text
Keywords: gas sensor; zirconia; composite film; nitrogen dioxide gas sensor; zirconia; composite film; nitrogen dioxide
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Myasoedova, T.N.; Mikhailova, T.S.; Yalovega, G.E.; Plugotarenko, N.K. Resistive Low-Temperature Sensor Based on the SiO2ZrO2 Film for Detection of High Concentrations of NO2 Gas. Chemosensors 2018, 6, 67.

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