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Journal: Chemosensors, 2023
Volume: 11
Number: 443
Article:
Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology
Authors:
by
Gennady Gorokh, Igor Taratyn, Uladzimir Fiadosenka, Olga Reutskaya and Andrei Lozovenko
Link:
https://www.mdpi.com/2227-9040/11/8/443
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