Article Versions Notes

Ruan Y, Chen Y, Wu Y, Shi M, Du Y, Song Z, Chen Y, Dong H, Zhang C, Teng J. Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application. Chemosensors. 2023; 11(4):225. https://doi.org/10.3390/chemosensors11040225

Ruan, Yong, Yang Chen, Yu Wu, Meng Shi, Yan Du, Zhiqiang Song, Yiyang Chen, Helei Dong, Congchun Zhang, and Jiao Teng. 2023. "Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application" Chemosensors 11, no. 4: 225. https://doi.org/10.3390/chemosensors11040225

Ruan, Y., Chen, Y., Wu, Y., Shi, M., Du, Y., Song, Z., Chen, Y., Dong, H., Zhang, C., & Teng, J. (2023). Novel SAW Temperature Sensor with Pt/Ti/AlN/Mo/AlN/Si Structure for High Temperature Application. Chemosensors, 11(4), 225. https://doi.org/10.3390/chemosensors11040225