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Journal: ElectronicsVolume: 12Number: 3153
Article: Adjustment Method of MEMS Dual-Cantilever Deflection Using Plastic Deformation of Al and Ni Thin Film by Thermal Annealing
  • Authors:
  • Masaru Tanaka1,2,*,
  • Yota Iijima2 and
  • Yusuke Masuda2
  • et al.
Link: https://www.mdpi.com/2079-9292/12/14/3153

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