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Journal: Electronics, 2023
Volume: 12
Number: 3153

Article: Adjustment Method of MEMS Dual-Cantilever Deflection Using Plastic Deformation of Al and Ni Thin Film by Thermal Annealing
Authors: by Masaru Tanaka, Yota Iijima, Yusuke Masuda, Tsubasa Sato and Takashi Mineta
Link: https://www.mdpi.com/2079-9292/12/14/3153

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