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Coatings 2018, 8(8), 263; https://doi.org/10.3390/coatings8080263

Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering

1
Department of Materials Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan
2
Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City 24301, Taiwan
3
Institute of Materials Engineering, National Taiwan Ocean University, Keelung 20224, Taiwan
*
Author to whom correspondence should be addressed.
Received: 1 July 2018 / Revised: 21 July 2018 / Accepted: 26 July 2018 / Published: 27 July 2018
(This article belongs to the Special Issue Design and Synthesis of Hard Coatings)
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Abstract

Zr–Si–N films were fabricated through the co-deposition of high-power impulse magnetron sputtering (HiPIMS) and radio-frequency magnetron sputtering (RFMS). The mechanical properties of the films fabricated using various nitrogen flow rates and radio-frequency powers were investigated. The HiPIMS/RFMS co-sputtered Zr–Si–N films were under-stoichiometric. These films with Si content of less than 9 at.%, and N content of less than 43 at.% displayed a face-centered cubic structure. The films’ hardness and Young’s modulus exhibited an evident relationship to their compressive residual stresses. The films with 2–6 at.% Si exhibited high hardness of 33–34 GPa and high Young’s moduli of 346–373 GPa, which was accompanied with compressive residual stresses from −4.4 to −5.0 GPa. View Full-Text
Keywords: HiPIMS; mechanical properties; residual stress; RFMS HiPIMS; mechanical properties; residual stress; RFMS
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Chang, L.-C.; Zheng, Y.-Z.; Chen, Y.-I. Mechanical Properties of Zr–Si–N Films Fabricated through HiPIMS/RFMS Co-Sputtering. Coatings 2018, 8, 263.

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