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Journal: CoatingsVolume: 8Number: 10
Article: Effects of Negative Bias Voltage and Ratio of Nitrogen and Argon on the Structure and Properties of NbN Coatings Deposited by HiPIMS Deposition System
- Authors:
- Jicheng Ding1,2,
- Tengfei Zhang2 and
- Haijuan Mei3
- et al.
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