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Journal: Coatings, 2024
Volume: 14
Number: 1115

Article: A New Paradigm for Semiconductor Manufacturing: Integrated Synthesis, Delivery, and Consumption of Source Chemicals for IC Fabrication
Authors: by Barry Arkles and Alain E. Kaloyeros
Link: https://www.mdpi.com/2079-6412/14/9/1115

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