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Journal: CoatingsVolume: 13Number: 638
Article: Al2O3 Ultra-Thin Films Deposited by PEALD for Rubidium Optically Pumped Atomic Magnetometers with On-Chip Photodiode
- Authors:
- Florival M. Cunha1,2,*,
- Manuel F. Silva1,2 and
- Nuno M. Gomes1,2
- et al.
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