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Journal: Coatings, 2023
Volume: 13
Number: 638

Article: Al2O3 Ultra-Thin Films Deposited by PEALD for Rubidium Optically Pumped Atomic Magnetometers with On-Chip Photodiode
Authors: by Florival M. Cunha, Manuel F. Silva, Nuno M. Gomes and José H. Correia
Link: https://www.mdpi.com/2079-6412/13/3/638

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