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Journal: CoatingsVolume: 12Number: 926
Article: Comparison of Self-Assembled Monolayers on SiO2 and Porous SiOCH Dielectrics by Decyltrimethoxysilane Vapor Treatment
- Authors:
- Yi-Lung Cheng1,*,
- Wei-Fan Peng1 and
- Chih-Yen Lee1
- et al.
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