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Journal: CoatingsVolume: 12Number: 371
Article: Evaluation of Sputtered Mo–Cu–Cr–N Coatings Prepared at Different N2 Gas Flow Rates Using a Multicomponent Single-Alloy Target
- Authors:
- Soobyn Kim1,2,
- Ki Won An1,3 and
- Caroline Sunyong Lee2,*
- et al.
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