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Journal: Coatings, 2022
Volume: 12
Number: 80
80
Article: Synthesis, Properties and Aging of ICP-CVD SiC_xN_y:H Films Formed from Tetramethyldisilazane
Authors: by Maksim N. Chagin, Veronica S. Sulyaeva, Vladimir R. Shayapov, Aleksey N. Kolodin, Maksim N. Khomyakov, Irina V. Yushina and Marina L. Kosinova
Link: https://www.mdpi.com/2079-6412/12/1/80

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