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Journal: Coatings, 2022
Volume: 12
Number: 36
36
Article: Tantalum-Titanium Oxynitride Thin Films Deposited by DC Reactive Magnetron Co-Sputtering: Mechanical, Optical, and Electrical Characterization
Authors: by Daniel Cristea, Ioana-Laura Velicu, Luis Cunha, Nuno Barradas, Eduardo Alves and Valentin Craciun
Link: https://www.mdpi.com/2079-6412/12/1/36

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