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Journal: Coatings, 2021
Volume: 11
Number: 1063
1063
Article: Hetero-Epitaxial Growth of AlN Deposited by DC Magnetron Sputtering on Si(111) Using a AlN Buffer Layer
Authors: by Badis Riah, Julien Camus, Abdelhak Ayad, Mohammad Rammal, Raouia Zernadji, Nadjet Rouag and Mohamed Abdou Djouadi
Link: https://www.mdpi.com/2079-6412/11/9/1063

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