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Journal: Coatings, 2021
Volume: 11
Number: 645

Article: Electron-Beam Deposition of Aluminum Nitride and Oxide Ceramic Coatings for Microelectronic Devices
Authors: by Yury G. Yushkov, Efim M. Oks, Andrey V. Tyunkov, Alexey Yu Yushenko and Denis B. Zolotukhin
Link: https://www.mdpi.com/2079-6412/11/6/645

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