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Journal: Coatings, 2021
Volume: 11
Number: 2

Article: Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding
Authors: by Wei-Chun Chen, Sheng Chen, Tung-Yuan Yu, James Su, Hung-Pin Chen, Yu-Wei Lin and Chin-Pao Cheng
Link: https://www.mdpi.com/2079-6412/11/1/2

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