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Journal: Coatings, 2021
Volume: 11
Number: 2
Article:
Growth of Si3N4 Thin Films on Si(111) Surface by RF-N2 Plasma Nitriding
Authors:
by
Wei-Chun Chen, Sheng Chen, Tung-Yuan Yu, James Su, Hung-Pin Chen, Yu-Wei Lin and Chin-Pao Cheng
Link:
https://www.mdpi.com/2079-6412/11/1/2
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