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Coatings2021, 11(1), 105;https://doi.org/10.3390/coatings11010105

Journal: CoatingsVolume: 11Number: 105

Article: Surface Analysis of Chamber Coating Materials Exposed to CF₄/O₂ Plasma

Authors:
Seung Hyun Park,
Kyung Eon Kim and
Sang Jeen Hong^*

Link: https://www.mdpi.com/2079-6412/11/1/105

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