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Journal: Coatings, 2020
Volume: 10
Number: 768
Article:
Glancing Angle Deposition and Growth Mechanism of Inclined AlN Nanostructures Using Reactive Magnetron Sputtering
Authors:
by
Samiran Bairagi, Kenneth Järrendahl, Fredrik Eriksson, Lars Hultman, Jens Birch and Ching-Lien Hsiao
Link:
https://www.mdpi.com/2079-6412/10/8/768
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