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Journal: CoatingsVolume: 10Number: 633
Article: Ultra-Short Pulse HiPIMS: A Strategy to Suppress Arcing during Reactive Deposition of SiO2 Thin Films with Enhanced Mechanical and Optical Properties
- Authors:
- Vasile Tiron1,
- Ioana-Laura Velicu2,* and
- Teodora Matei2
- et al.
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