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Journal: CoatingsVolume: 10Number: 149
Article: Structural Properties and Oxidation Resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx Multilayered Films Deposited by Magnetron Sputtering Technique
- Authors:
- Ihar Saladukhin1,
- Gregory Abadias2,* and
- Jacques Herman O’Connell4
- et al.
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