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Journal: Nanomaterials, 2018
Volume: 8
Number: 1008

Article: Measurements of Microstructural, Chemical, Optical, and Electrical Properties of Silicon-Oxygen-Nitrogen Films Prepared by Plasma-Enhanced Atomic Layer Deposition
Authors: by , , , , , , , and
Link: https://www.mdpi.com/2079-4991/8/12/1008

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