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Journal: Nanomaterials, 2024
Volume: 14
Number: 1686
Article:
Enhancing Charge Trapping Performance of Hafnia Thin Films Using Sequential Plasma Atomic Layer Deposition
Authors:
by
So-Won Kim, Jae-Hoon Yoo, Won-Ji Park, Chan-Hee Lee, Joung-Ho Lee, Jong-Hwan Kim, Sae-Hoon Uhm and Hee-Chul Lee
Link:
https://www.mdpi.com/2079-4991/14/20/1686
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