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Journal: Nanomaterials, 2023
Volume: 13
Number: 2898
Article:
A Comparative Study of Gallium-, Xenon-, and Helium-Focused Ion Beams for the Milling of GaN
Authors:
by
Shuai Jiang and Volkan Ortalan
Link:
https://www.mdpi.com/2079-4991/13/21/2898
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