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Journal: Nanomaterials, 2022
Volume: 12
Number: 481
Article:
300 mm Large Area Wire Grid Polarizers with 50 nm Half-Pitch by ArF Immersion Lithography
Authors:
by
Jungchul Song, Jae Sub Oh, Min Jun Bak, Il-Suk Kang, Sung Jung Lee and Ga-Won Lee
Link:
https://www.mdpi.com/2079-4991/12/3/481
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