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Journal: Nanomaterials, 2021
Volume: 11
Number: 2117

Article: Measurement of Nanometre-Scale Gate Oxide Thicknesses by Energy-Dispersive X-ray Spectroscopy in a Scanning Electron Microscope Combined with Monte Carlo Simulations
Authors: by Thomas Walther
Link: https://www.mdpi.com/2079-4991/11/8/2117

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