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Synthetic Data in Quantitative Scanning Probe Microscopy

by 1,* and 1,2
Central European Institute of Technology, Brno University of Technology, Purkyňova 123, 61200 Brno, Czech Republic
Czech Metrology Institute, Okružní 31, 63800 Brno, Czech Republic
Author to whom correspondence should be addressed.
Academic Editor: Linda J. Johnston
Nanomaterials 2021, 11(7), 1746;
Received: 6 May 2021 / Revised: 28 June 2021 / Accepted: 29 June 2021 / Published: 2 July 2021
(This article belongs to the Special Issue Nanometrology)
Synthetic data are of increasing importance in nanometrology. They can be used for development of data processing methods, analysis of uncertainties and estimation of various measurement artefacts. In this paper we review methods used for their generation and the applications of synthetic data in scanning probe microscopy, focusing on their principles, performance, and applicability. We illustrate the benefits of using synthetic data on different tasks related to development of better scanning approaches and related to estimation of reliability of data processing methods. We demonstrate how the synthetic data can be used to analyse systematic errors that are common to scanning probe microscopy methods, either related to the measurement principle or to the typical data processing paths. View Full-Text
Keywords: nanometrology; data synthesis; scanning probe microscopy nanometrology; data synthesis; scanning probe microscopy
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MDPI and ACS Style

Nečas, D.; Klapetek, P. Synthetic Data in Quantitative Scanning Probe Microscopy. Nanomaterials 2021, 11, 1746.

AMA Style

Nečas D, Klapetek P. Synthetic Data in Quantitative Scanning Probe Microscopy. Nanomaterials. 2021; 11(7):1746.

Chicago/Turabian Style

Nečas, David, and Petr Klapetek. 2021. "Synthetic Data in Quantitative Scanning Probe Microscopy" Nanomaterials 11, no. 7: 1746.

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