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Journal: NanomaterialsVolume: 10Number: 2562
Article: Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar (\({11\overline{2}2}\)) and Non-Polar (\({11\overline{2}0}\)) GaN Nanorods
- Authors:
- Pierre-Marie Coulon1,*,
- Peng Feng2 and
- Tao Wang2
- et al.
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