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Journal: Nanomaterials, 2020
Volume: 10
Number: 2562

Article: Impact of Inductively Coupled Plasma Etching Conditions on the Formation of Semi-Polar (\({11\overline{2}2}\)) and Non-Polar (\({11\overline{2}0}\)) GaN Nanorods
Authors: by Pierre-Marie Coulon, Peng Feng, Tao Wang and Philip A. Shields
Link: https://www.mdpi.com/2079-4991/10/12/2562

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