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Journal: Appl. Sci., 2025
Volume: 15
Number: 4305
4305
Article: Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings
Authors: by Andrey V. Kaziev, Alexander V. Tumarkin, Dobrynya V. Kolodko, Maksim M. Kharkov, Raghavendra Konaguru, Dmitry G. Ageychenkov, Nikolay N. Samotaev and Konstantin Yu. Oblov
Link: https://www.mdpi.com/2076-3417/15/8/4305

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