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Journal: Appl. Sci., 2025
Volume: 15
Number: 1573
Article:
Defect Tailoring in HfO2/Si Films upon Post-Deposition Annealing and Ultraviolet Irradiation
Authors:
by
Silvestre Salas-RodrÃguez, Fernanda I. González-Moreno, Rosa M. Woo-GarcÃa, AgustÃn L. Herrera-May, Francisco López-Huerta and Felipe Caballero-Briones
Link:
https://www.mdpi.com/2076-3417/15/3/1573
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