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Journal: Appl. Sci., 2023
Volume: 13
Number: 1118
Article:
Study of Dynamics in Metallic MEMS Cantilevers—Pull-In Voltage and Actuation Speed
Authors:
by
Xiaohui Yang, Philipp Kästner, Eireen Käkel, Marek Smolarczyk, Shujie Liu, Qingdang Li and Hartmut Hillmer
Link:
https://www.mdpi.com/2076-3417/13/2/1118
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