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Numerical and Experimental Research on the Laser-Water Jet Scribing of Silicon
 
 

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Journal: Appl. Sci., 2022
Volume: 12
Number: 13013

Article: Special Issue on Laser Micro/Nano Machining Technology
Authors: by Jianlei Cui
Link: https://www.mdpi.com/2076-3417/12/24/13013

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