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Journal: Appl. Sci., 2021
Volume: 11
Number: 4358
Article:
Kinematic Prediction and Experimental Demonstration of Conditioning Process for Controlling the Profile Shape of a Chemical Mechanical Polishing Pad
Authors:
by
Hanchul Cho, Taekyung Lee, Doyeon Kim and Hyoungjae Kim
Link:
https://www.mdpi.com/2076-3417/11/10/4358
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