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Journal: Applied SciencesVolume: 10Number: 8362
Article: A Study on the Influence of the Cross-Sectional Shape of the Metal-Inserted Retainer Ring and the Pressure Distribution from the Multi-Zone Carrier Head to Increase the Wafer Yield
  • Authors:
  • Joon-Yeon Park1,†,
  • Je-Heon Han1,† and
  • Changwon Kim2,*
Link: https://www.mdpi.com/2076-3417/10/23/8362

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