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Article

Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses

by
Emil R. Mamleyev
1,*,
Chun Him Lee
1,
Jan G. Korvink
1,
Manfred Kohl
1 and
Kirill V. Poletkin
1,2,*
1
Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2
School of Instrument Science and Opto-Electronics Engineering, Hefei University of Technology, Hefei 230009, China
*
Authors to whom correspondence should be addressed.
Actuators 2023, 12(2), 48; https://doi.org/10.3390/act12020048
Submission received: 23 December 2022 / Revised: 14 January 2023 / Accepted: 18 January 2023 / Published: 20 January 2023
(This article belongs to the Special Issue Conventional and Micromachined Electromagnetic Levitation Actuators)
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Abstract

This paper presents the results of a comprehensive study of the pull-in phenomenon in the hybrid levitation microactuator (HLMA), in which square-shaped proof masses (PMs) of different sizes, namely, length sides of 2.8 and 3.2 mm and thicknesses of 25 and 10 μm were electromagnetically levitated. The pull-in actuation of the square-shaped PMs was performed by the electrostatic force generated by the set of energized electrodes and acting on the bottom surface of the PMs along the vertical direction. The pull-in parameters, such as pull-in displacements and the corresponding applied pull-in voltages, were measured with the developed setup. The experimental measurements showed that the pull-in actuation is nonlinearly dependent on the size and mass of the PMs and a levitation height. In particular, it was found that PMs levitated within a height range from 140 to 170 μm can be stably displaced within a range of 30 μm. The results of measurements were extensively simulated with the developed analytical model by means of the quasi-FEM method. The direct comparison of the results of simulation and measurements showed a very good agreement between the theory and experiments.
Keywords: microactuators; electromagnetic levitation; pull-in; finite element method; modeling microactuators; electromagnetic levitation; pull-in; finite element method; modeling

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MDPI and ACS Style

Mamleyev, E.R.; Lee, C.H.; Korvink, J.G.; Kohl, M.; Poletkin, K.V. Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses. Actuators 2023, 12, 48. https://doi.org/10.3390/act12020048

AMA Style

Mamleyev ER, Lee CH, Korvink JG, Kohl M, Poletkin KV. Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses. Actuators. 2023; 12(2):48. https://doi.org/10.3390/act12020048

Chicago/Turabian Style

Mamleyev, Emil R., Chun Him Lee, Jan G. Korvink, Manfred Kohl, and Kirill V. Poletkin. 2023. "Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses" Actuators 12, no. 2: 48. https://doi.org/10.3390/act12020048

APA Style

Mamleyev, E. R., Lee, C. H., Korvink, J. G., Kohl, M., & Poletkin, K. V. (2023). Experimental Study and Simulation of Pull-In Behavior in Hybrid Levitation Microactuator for Square-Shaped Proof Masses. Actuators, 12(2), 48. https://doi.org/10.3390/act12020048

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