Search Results (105)

Submarine power cables for offshore wind farms experience continuous cyclic loading from environmental forces and floating-platform motions, making fatigue performance a critical design factor. This study combined global and local analyses to investigate the fatigue behavior of a 66 kV dry-type submarine cable installed using a flexible pull-in installation system. A global dynamic analysis using site-specific meteorological and oceanographic data provided time-series displacement responses that were used to evaluate the fatigue damage to the metallic components of the cable. The results indicated that the minimum fatigue life of 8.71 × 10⁴ cycles occurred at the upper metallic sheath near the fixed end, with a corresponding cumulative damage of 1.147 × 10⁻⁵. Fatigue accumulation was predominantly governed by lateral (y-direction) displacement, while axial and vertical displacement components contributed minimally. Furthermore, the predicted fatigue life of the metallic sheath varied by a factor of up to 3.6 depending on the selected curve, comparing the cyclic stress amplitude and number of cycles to failure (S–N curve), highlighting the importance of accurate material fatigue data. These findings emphasize the need for careful evaluation of the environmental loading and sheath fatigue properties in flexible pull-in installation system-based submarine cable system designs. Full article

The initial value problem for a model of magnetic Micro-Electro-Mechanical System (magMEMS) with current-carrying conductors is considered. The model equation is a conservative MEMS oscillator due to the presence of the singular term corresponding to the magnetic force between two current-conducting wires. If the excitation parameter is below a certain threshold, the actuator oscillates. Fourier approximation of periodic solutions is enhanced by neural network space handling for both the limiting case where the geometric parameter approaches zero and the general case with arbitrary geometric parameter values. The method is validated through numerical comparisons with high-precision solutions, and its limitations are identified during the verification of experimental results. The findings can be useful for the design of magMEMS models. Full article

This paper presents a comprehensive investigation of sensitivity-determining factors in dual-backplate capacitive MEMS microphones through analytical modeling, finite element analysis (FEM), and experimental validation. The study focuses on three critical design parameters: backplate perforation density, membrane tension, and electrode gap spacing. A lumped parameter model (LPM) and FEM simulations are employed to characterize the dynamic behavior and frequency response of the microphone. Simulation results demonstrate that reducing the backplate hole diameter or hole count amplifies squeeze-film damping, inducing nonlinear effects and anti-resonance dips near the fundamental frequency (f0) while mitigating low-frequency roll-off (<100 Hz). Membrane tension exhibits a nonlinear relationship with sensitivity, stabilizing at high tension (>7000 N/m) but risking pull-in instability at low tension (<1500 N/m). Smaller electrode gaps enhance sensitivity but are constrained by pull-in voltage limitations. The FEM model achieves higher accuracy (≤2 dB error) than LPM in predicting low-frequency response anomalies. This work provides systematic guidelines for optimizing dual-backplate MEMS microphone designs, balancing sensitivity, stability, and manufacturability. Full article

As MEMS design encounters growing challenges, particularly stiction between movable and stationary electrodes, dielectric charging, pull-in instability, and multi-valued response characteristics, the integration of dimple-equipped structures has emerged as a pivotal solution to mitigate these fundamental issues. Consequently, this study investigates the dynamic behavior of an electrostatically actuated double-clamped microbeam incorporating dimples and contact pads. While the dimples enhance the beam’s travel range, they may also induce an impact mode upon contact with the landing pads, leading to complex nonlinear dynamic phenomena. A reduced-order model was developed to numerically solve the governing equation of motion. The microbeam’s response was analyzed both with and without dimples using multiple analytical techniques, including bifurcation diagrams and discrete excitation procedures near the impacting regime. The findings demonstrate that the inclusion of dimples effectively suppresses stiction, pull-in instability, and multi-valued responses. The results indicate that upon contacting the landing pads, the beam exhibits pronounced nonlinear dynamic behaviors, manifesting as higher-period oscillations such as period-3, period-4 and period-5 and then fully developed chaotic attractors. Indeed, this specifically demonstrates the potential of using the dynamic transition from a steady-state to a chaotic response to build novel MEMS sensors. Full article

Electromagnetic pneumatic microvalves, widely used in knitting machines, typically operate based on a spring-return mechanism. When the coil is energized, the electromagnetic force overcomes the spring force to attract the armature, opening the valve. Upon de-energization, the armature returns to its original position under the restoring force of the spring, closing the valve. However, most existing electromagnetic microvalves adopt a radially asymmetric magnetic yoke design, which generates additional radial forces during operation, leading to armature misalignment or even sticking. Additionally, the inductance effect of the coil causes a significant delay in the armature release response, making it difficult to meet the knitting machine’s requirements for rapid response and high reliability. To address these issues, this paper proposes an improved electromagnetic microvalve design. First, the magnetic yoke structure is modified to be radially symmetric, eliminating unnecessary radial forces and preventing armature sticking during operation. Second, a permanent magnet assist mechanism is introduced at the armature release end to enhance release speed and reduce delays caused by the inductance effect. The effectiveness of the proposed design is validated through electromagnetic numerical simulations, and a multi-objective genetic algorithm is further employed to optimize the geometric dimensions of the electromagnet. The optimization results indicate that, while maintaining the fundamental power supply principle of conventional designs, the new microvalve structure achieves a pull-in time comparable to traditional designs during engagement but significantly reduces the release response time by approximately 80.2%, effectively preventing armature sticking due to radial forces. The findings of this study provide a feasible and efficient technical solution for the design of electromagnetic microvalves in textile machinery applications. Full article

Radio Frequency Micro Electro Mechanical Systems (RF MEMS) are devices showing exceptional potential to satisfy the demands of emerging RF electronic technologies, including those considered for high-power applications, such as for long distance communication systems. Operation in this regime requires an alternative way of thinking for these devices and, for example, a more accurate control of the pull-in voltage is of major importance due to the self-actuation effect. Therefore, the studies focusing on the features of the moving bridges are of great importance. This work presents the fabrication of a full family of RF MEMS switches suitable for high-power implementations having bridges deposited by Au electroplating and released using purely standard wet processes, as well as a carefully designed experimental study of their pull-in voltage. Depositing the bridge of the high-power RF MEMS by using only a single electroplating step makes the device fabrication easier, whilst the utilization of a purely wet release process is an asset. This method relies on low temperature processes, applicable simultaneously in bridges with various geometrical and perforation details without the need of any specialised infrastructure. The experimentally obtained results suggest that for this technology the bridge thickness is a critical factor for controlling the pull-in characteristics between devices fabricated in the same run. Moreover, it is revealed that for thicker bridges, geometry and hole perforation effects are more pronounced. This technology is therefore suitable for developing RF MEMS where the bridge thickness could be potentially utilized for enabling optimization engineering between devices that should be fabricated in the same run but need to satisfy diverse specifications during their operation. Full article

The pull-in and pull-out voltages are important characteristics of Capacitive Micromachined Ultrasound Transducers (CMUTs), marking the transition between conventional and collapse operation regimes. These voltages are commonly determined using capacitance–voltage (C-V) sweeps. By modeling the operating conditions of an LCR meter in COMSOL Multiphysics^®, we demonstrate that the measured capacitance comprises both static and dynamic capacitances, with the dynamic capacitance causing the appearance of a peak in the effective C-V curve. Furthermore, Laser Doppler Vibrometer (LDV) measurements and electromechanical simulations indicate the occurrence of collapse–snapback phenomena during the C-V sweeps. This study, through advanced simulations and experimental analyses, demonstrates that the transient membrane behavior significantly affects the apparent capacitance–voltage characteristics of electrostatically actuated Micro-Electromechanical Systems (MEMS). Full article

This article presents the electrostatic actuation performance of micromirror arrays for intelligent active daylight control and energy management in green buildings using a capacitive–voltage (C-V) measurement technique. In order to understand how geometric hinge parameters, initial opening angles, and materials affect the overall efficiency and functionality of the system, micromirror arrays have been analyzed using C-V measurements considering (i) full and broken hinge structures, (ii) 90° and 130° initial tilt angles (Φ), and (iii) different material layer combinations. The measurement results indicate that both an increase in the Young’s modulus of the applied materials and increasing the initial tilt angles increase the threshold voltages during the closing process of the micromirrors. Full article

Millions of electrostatically actuatable micromirror arrays have been arranged in between windowpanes in inert gas environments, enabling active daylighting in buildings for illumination and climatization. MEMS smart windows can reduce energy consumption significantly. However, to allow personalized light steering for arbitrary user positions with high flexibility, two main limitations must be overcome: first, limited tuning angle spans by MEMS pull-in effects; and second, the lack of a second orthogonal tuning angle, which is highly required. Firstly, design improvements of electrostatically actuatable micromirror arrays are reported by utilizing tailored bottom electrode structures for enlarging the tilt angle (Φ). Considerably larger tuning ranges are presented, significantly improving daylight steering into buildings. Secondly, 2D actuation means free movement of micromirrors via two angles—tilt (Φ) and torsion angle (θ)—while applying two corresponding voltages between the metallic micromirrors and corresponding FTO (fluorine-doped tin oxide) counters bottom electrode pads. In addition, a solution for a notorious problem in MEMS actuation is presented. Micromirror design modifications are necessary to eliminate possible crack formation on metallic structure due to stress concentration during the free movement of 2D actuatable micromirror arrays. The concept, design of micromirror arrays and bottom electrodes, as well as technological fabrication and experimental results are presented and discussed. Full article

Silicon–glass anode bonding is the key technology in the process of wafer-level packaging for MEMS sensors. During the anodic bonding process, the device may experience adhesion failure due to the influence of electric field forces. A common solution is to add a metal shielding layer between the glass substrate and the device. In order to solve the problem of device failure caused by the electrostatic attraction phenomenon, this paper designed a double-ended solidly supported cantilever beam parallel plate capacitor structure, focusing on the study of the critical size of the window opening in the metal layer for the electric field shielding effect. The metal shield consists of 400 Å of Cr and 3400 Å of Au. Based on theoretical calculations, simulation analysis, and experimental testing, it was determined that the critical size for an individual opening in the metal layer is 180 μm × 180 μm, with the movable part positioned 5 μm from the bottom, which does not lead to failure caused by stiction due to electrostatic pull-in of the detection structure. It was proven that the metal shielding layer is effective in avoiding suction problems in secondary anode bonding. Full article

Despite major advances in the field of actuator technology for microsystems, miniaturized microfluidic actuation systems for mobile devices are still not common in the market. We present a micropump concept and an associated mass flow sensor design, which, in combination, have the potential to form the basis for an integrated microfluidic development platform for microfluidic systems in general and microdosing systems in particular. The micropump combines the use of active valves with an electrostatic drive principle for the pump membrane and the valves, respectively. With a size of only 1.86 mm × 1.86 mm × 0.3 mm, the first prototypes are capable of pumping gaseous media at flow rates of up to 110 μL/min. A specific feature of the presented micropump is that the pumping direction is perpendicular to the chip surface. The corresponding flow sensor combines the principle of hot-wire anemometry with a very small footprint of only 1.4 mm × 1.4 mm × 0.4 mm. The main innovation is that the hot wires are fixed inside a through-hole in the substrate of the microchip, so that the flow direction of the fluid to be measured is perpendicular to the chip surface, which enables direct integration with the presented micropump. Detection thresholds of around 10 μL/min and measuring ranges of up to 20 mL/min can be achieved with the first prototypes, without dedicated evaluation electronics. Full article

Due to its excellent electrical performance, mechanical reliability, and thermal stability, electroplated gold is still the most commonly used material for movable beams in RF MEMS switches. This paper investigates the influence of process conditions on the quality and growth rate of gold electroplating, and the optimized process parameters for the gold electroplating process are obtained. The characterization of the optimized electroplated gold layer shows that it has small surface roughness and excellent thermal stability. With this optimized gold electroplating process, the RF MEMS switches are fabricated and hermetic packaged. In order to obtain the temperature environment adaptability of the packaged switch, the influence of working temperature is studied. The temperature effects on mechanical performance (includes pull-in voltage and lifetime) and RF performance (includes insertion loss and isolation) are revealed. Full article

This study presents the design and simulation of an RF MEMS variable capacitor with a high tuning ratio and high linearity factor of capacitance–voltage response. An electrostatic torsion actuator with planar and non-planar structures is presented to obtain the high tuning ratio by avoiding the occurrence of pull-in point. In the proposed design, the capacitor plate is connected to the electrostatic actuators by using the s-shaped beam. The proposed design shows a 138% tuning ratio with the planar structure of the actuator and 167% tuning ratio by implementing the non-planar structure. A linearity factor of 99% is attained by adjusting the rates at which the capacitor plate rises as the actuation voltage increases and the rate at which the capacitance decreases as the plate rises. Parametric optimization of the design is performed by utilizing the finite element method (FEM) analysis and high-frequency structural simulator (HFSS) analysis to obtain an optimized high-tuning ratio RF MEMS varactor at low actuation voltage. S-parameters of the design are presented on HFSS, with a 50 ohm coplanar waveguide (CPW) serving as the transmission line. The proposed RF MEMS varactor can be utilized in tunable RF devices. Full article

In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator geometry and transduction. In proper FEA or analytical modeling, the explicit description and accurate values of the effective mass and stiffness of the resonator structure are needed. Therefore, here we outlined an analytical model approach to calculate those values using the first principles of kinetic and potential energy analyses. The natural frequencies of the structure were then calculated using those parameters and compared with those that were simulated using the FEA tool ANSYS. Dynamic analysis was performed to calculate the pull-in voltage, shift of resonance frequency, and harmonic analyses of the ring to understand how the ring resonator is affected by the applied voltage. Additional analysis was performed for different orientations of silicon and assessing the frequency response and frequency shifts. The prototype was fabricated using the standard silicon-on-insulator (SOI)-based MEMS fabrication process and the experimental results for resonances showed good agreement with the developed model approach. The model approach presented in this paper can be used to provide valuable insights for the optimization of MEMS resonators for various operating conditions. Full article

MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode’s fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode’s fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator’s performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage. Full article