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Journal: Minerals, 2022
Volume: 12
Number: 651
651
Article: Boron Impurity Deposition on a Si(100) Surface in a SiHCl₃-BCl₃-H₂ System for Electronic-Grade Polysilicon Production
Authors: by Qinghong Yang, Fengyang Chen, Lin Tian, Jianguo Wang, Ni Yang, Yanqing Hou, Lingyun Huang and Gang Xie
Link: https://www.mdpi.com/2075-163X/12/5/651

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