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Journal: Polymers, 2023
Volume: 15
Number: 1988

Article: Coarse-Grained Modeling of EUV Patterning Process Reflecting Photochemical Reactions and Chain Conformations
Authors: by Tae-Yi Kim, In-Hwa Kang, Juhae Park, Myungwoong Kim, Hye-Keun Oh and Su-Mi Hur
Link: https://www.mdpi.com/2073-4360/15/9/1988

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