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Journal: Crystals, 2024
Volume: 14
Number: 460
Article:
Effect of Polyoxyethylene-Based Nonionic Surfactants on Chemical–Mechanical Polishing Performance of Monocrystalline Silicon Wafers
Authors:
by
Bowen Jiang, Jie Guan, Peng Zhao, Yulin Chen and Zefang Zhang
Link:
https://www.mdpi.com/2073-4352/14/5/460
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