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Journal: MicromachinesVolume: 9Number: 501
Article: Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters
  • Authors:
  • Shuren Song1,
  • Da Chen1,2,* and
  • Hongfei Wang1
  • et al.
Link: https://www.mdpi.com/2072-666X/9/10/501

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