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Journal: MicromachinesVolume: 16Number: 74
Article: Design and Fabrication of Ultrathin Metallic Phase Shifters for Visible and Near-Infrared Wavelengths
- Authors:
- Qing Guo1,2,
- Jinkui Chu1,2,3,* and
- Chuanlong Guan1,2
- et al.
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