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Journal: MicromachinesVolume: 15Number: 747
Article: Pulsed Laser Ablation Characteristics of Light-Absorbing Mask Layer Based on Coating Thicknesses under Laser Lift-Off Patterning Process
- Authors:
- Daehee Hyun1,2,
- Hee-Lak Lee1 and
- Yoon-Jae Moon1,2
- et al.
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