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Journal: MicromachinesVolume: 15Number: 667
Article: Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II
  • Authors:
  • Weidong Wang1,*,
  • Yong Ruan2 and
  • Zaifa Zhou3
  • et al.
Link: https://www.mdpi.com/2072-666X/15/6/667

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